Influence of Gas Mixture Ratio on Laser Output Energy of Discharge-Pumped KrF Excimer Laser
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چکیده
منابع مشابه
Fast - Discharge - Initiated KrF Laser
Intense laser emission has been observed from the KrF molecule formed by a chemical reaction initiated by fast-discharge circuitry. With a gas mixture of He:Kr:NF, = 500:50:1 and a sample pressure of 700 Torr, an output energy of 0. 8 mj was measured from a 25-nsec laser pulse (FWHM). Spectral analysis of the laser emission indicated laser action at 248.5 and 249.5 nm.
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electronics, Information and Systems
سال: 1993
ISSN: 0385-4221,1348-8155
DOI: 10.1541/ieejeiss1987.113.2_98